发明名称 |
TRANSMISSION ELECTRON MICROSCOPE AND TEST SAMPLE OBSERVATION METHOD |
摘要 |
A transmission electron microscope includes an electron gun 1 that irradiates a sample 5 with an electron beam 2; an electron detector 13 that detects electrons that are passed through the sample 5 and scattered; a first detection-side annular aperture 15 that is located between the electron detector 13 and the sample 5 and has a ring-shaped slit that limits inner and outer diameters of a transmission region of electrons scattered from the sample 5; and a second detection-side annular aperture 16 that is located between the first detection-side annular aperture 15 and the electron detector 13 and has a ring-shaped slit that limits inner and outer diameters of a transmission region of scattered electrons that have passed through the first detection-side annular aperture 15. It is, therefore, possible to detect electrons scattered at high scattering angles without a limitation caused by a spherical aberration of an electron lens and improve a depth resolution. |
申请公布号 |
EP2511938(A4) |
申请公布日期 |
2014.03.12 |
申请号 |
EP20100835928 |
申请日期 |
2010.12.06 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NAGAOKI ISAO;TANIGAKI TOSHIAKI;OHTSU YOSHIHIRO |
分类号 |
H01J37/244;H01J37/09;H01J37/26 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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