| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ring-shaped holder for a double-ended grinding device capable of performing double-ended grinding to obtain a workpiece having more superior nano-topography as compared with conventional nano-topography with superior reproducibility, even when the double-ended grinding using a grinding wheel of a large diameter is performed. <P>SOLUTION: This ring-shaped holder is constituted of at least a detachable carrier including a holding hole for holding the workpiece at a center and a holder part for mounting the carrier. In the carrier, at least two or more radial slits are formed from an outer periphery of the carrier toward the inside. <P>COPYRIGHT: (C)2011,JPO&INPIT |
