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发明名称
微机电系统声压感测元件及其制作方法
摘要
申请公布号
TWI430424
申请公布日期
2014.03.11
申请号
TW100109392
申请日期
2011.03.18
申请人
原相科技股份有限公司 新竹市新竹科学园区创新一路5号5楼
发明人
王传蔚
分类号
H01L23/58;H01L29/84
主分类号
H01L23/58
代理机构
代理人
任秀妍 新竹市光复路2段481号9楼
主权项
地址
新竹市新竹科学园区创新一路5号5楼
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