电浆蚀刻方法及电浆蚀刻装置,申请号TW098138329-传众专利搜索

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发明名称	电浆蚀刻方法及电浆蚀刻装置
摘要
申请公布号	TWI430360	申请公布日期	2014.03.11
申请号	TW098138329	申请日期	2009.11.12
申请人	东京威力科创股份有限公司日本	发明人	西塚哲也;高桥正彦;小津俊久
分类号	H01L21/3065;H05H1/16	主分类号	H01L21/3065
代理机构		代理人	林秋琴台北市大安区敦化南路1段245号8楼;何爱文台北市大安区敦化南路1段245号8楼
主权项
地址	日本

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