| 发明名称 |
污染物屏蔽及包含该屏蔽之微影装置 |
| 摘要 |
|
| 申请公布号 |
TWI430041 |
申请公布日期 |
2014.03.11 |
| 申请号 |
TW096109370 |
申请日期 |
2007.03.19 |
| 申请人 |
ＡＳＭＬ荷兰公司 荷兰 |
发明人 |
蓝伯特 安德瑞纳 凡 登 威尔登伯格 |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
陈长文 台北市松山区敦化北路201号7楼 |
| 主权项 |
|
| 地址 |
荷兰 |
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