| 摘要 |
<p>The life cycle of a scribing wheel is lengthened, and the strength of a cross section of a substrate is strengthened when a brittle material substrate is cut after scribing. A diamond film is formed in a side by a CVD method by using a scribing wheel substrate where the center of a side around a circle plate is a maximum shortcut. Moreover, the center of a side is polished, and the center axis of the scribing wheel is perpendicular to a side including a circle which is made of a ridge. Accordingly, the roughness of a ridge part can be fine. The strength of the cross section can be improved by increasing the degree of accuracy of the cut substrate when the brittle material substrate is cut by scribing by using the scribing wheel. Moreover, even though scribing is processed, abrasion in the ridge part is small. Therefore, the life cycle of the scribing wheel can be lengthened.</p> |
