发明名称 SEMICONDUCTOR DEVICE
摘要 The present invention relates to a semiconductor device which is a technology to detect the connectivity of a through silicon via (TSV) at a wafer level. The present invention includes a first wire formed at the upper portion of a TSV, a second wire formed at the upper portion of the first wire, a first power line and a second power line formed on the same layer with the second wire. Accordingly, the present invention can reduce unnecessary costs and time consumption to package a failed chip by allowing a user to screen the connectivity between chips after packging and the connectivity between the TSV and the chip at a wafer level. [Reference numerals] (AA) Y axis
申请公布号 KR20140029697(A) 申请公布日期 2014.03.11
申请号 KR20120094990 申请日期 2012.08.29
申请人 SK HYNIX INC. 发明人 WOO, TAKE KYUN
分类号 H01L23/48;H01L21/768 主分类号 H01L23/48
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