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发明名称
光阻组成物及图型之形成方法
摘要
申请公布号
TWI430023
申请公布日期
2014.03.11
申请号
TW098123530
申请日期
2009.07.10
申请人
信越化学工业股份有限公司 日本
发明人
渡边聪;田中启顺;渡边武;金生刚
分类号
G03F7/004;G03F7/039;G03F7/038
主分类号
G03F7/004
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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