发明名称 Method of adjusting the resonance frequency of a micro-machined vibrating element
摘要 The present disclosure relates to a method of adjusting the resonance frequency of a vibrating element, comprising measuring the resonance frequency of the vibrating element, determining, using abacuses and as a function of the resonance frequency measured, a dimension and a position of at least one area of modified thickness to be formed on the vibrating element so that the resonance frequency thereof corresponds to a setpoint frequency, and forming on the vibrating element, an area of modified thickness of the determined dimension and position.
申请公布号 US8669687(B2) 申请公布日期 2014.03.11
申请号 US201213436262 申请日期 2012.03.30
申请人 CARPENTIER JEAN-FRANCOIS;CASSET FABRICE;CIVET YOAN;BASROUR SKANDAR;STMICROELECTRONICS SA 发明人 CARPENTIER JEAN-FRANCOIS;CASSET FABRICE;CIVET YOAN;BASROUR SKANDAR
分类号 H01L41/08 主分类号 H01L41/08
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