| 摘要 |
The present invention relates to a detection method for top surface of substrate and a scribe device. In a previous scribe device and in respect to the condition of distance measured up to the substrate, if the upper position of a scribe head is used as an origin, the position of the origin in every scribe device is different, thereby existing a drawback of being unable to establish a common correspondence table. This invention includes: using non-contact sensors to calculate the distance d1 up to the platform and the distance d2 up to a reference block; maintaining a differenceΔd of the distance d1 and the distance d2; making the scribe head descend to abut against the reference block; measuring the difference of the cutter tip and the platform so as to represent the position of the scribe head by using the top surface of the substrate as the position of zero. Therefore, by using the top surface of the platform as a zero point to establish a correspondence table that reports a scribe method of including the thickness of the substrate, no matter what kind of scribe device is used, the scribe process can be performed on the same kind of brittle material substrate. |
