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发明名称
使用晶片互连层的振动微机电系统谐振器之热感测器
摘要
申请公布号
TWI430568
申请公布日期
2014.03.11
申请号
TW099140390
申请日期
2010.11.23
申请人
英特尔股份有限公司 美国
发明人
艾德尔莫尼姆 穆罕默德;洛哈尔亚瑞比 托菲克;泰勒 葛瑞利;费契尔 凯文;杨 安德鲁
分类号
H03H9/15
主分类号
H03H9/15
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
美国
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