发明名称 |
Sample inspection methods, systems and components |
摘要 |
The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample. |
申请公布号 |
US8669525(B2) |
申请公布日期 |
2014.03.11 |
申请号 |
US20090997686 |
申请日期 |
2009.05.26 |
申请人 |
SIJBRANDIJ SYBREN;NOTTE, IV JOHN;THOMPSON WILLIAM B.;CARL ZEISS MICROSCOPY, LLC |
发明人 |
SIJBRANDIJ SYBREN;NOTTE, IV JOHN;THOMPSON WILLIAM B. |
分类号 |
H01J37/26 |
主分类号 |
H01J37/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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