发明名称 Method of and device for determining and controlling the distance between an integrated circuit and a substrate
摘要 In a method of determining the distance (d) between an integrated circuit (1) and a substrate (2) emitted light enters the at least semi transparent substrate (2), passes through the substrate (2) and an at least semi transparent material (8), is reflected by the integrated circuit (1), passes again through the material (8) and the substrate (2), and leaves the substrate (2). The at least semi transparent material (8), particularly is an at least semi transparent adhesive, provided between the substrate (2) and the integrated circuit (1). The distance (d) between the substrate (2) and the integrated circuit (1) is determined by evaluating the intensities of the light leaving and entering the substrate (2), particularly by evaluating the ratio between the intensities of the light leaving and entering the substrate (2).
申请公布号 US8669123(B2) 申请公布日期 2014.03.11
申请号 US20080745465 申请日期 2008.11.25
申请人 ZENZ CHRISTIAN;NXP B.V. 发明人 ZENZ CHRISTIAN
分类号 H01L21/00;G01B11/06 主分类号 H01L21/00
代理机构 代理人
主权项
地址