发明名称 RESIN COMPOSITION AND SEMICONDUCTOR ELEMENT SUBSTRATE
摘要 <p>A resin composition which contains a binder resin (A), radiation-sensitive compound (B), silane-modified resin (C), and antioxidant (D), wherein a content of the silane-modified resin (C) is 0.1 to 150 parts by weight with respect to 100 parts by weight of the binder resin (A), a content of the antioxidant (D) is 0.1 to 10 parts by weight with respect to 100 parts by weight of the binder resin (A), and an amount of warping is 14μm or less when using the resin composition to form a thickness 2 to 3μm resin film and baking the formed resin film at 230° C. is provided.</p>
申请公布号 KR20140029444(A) 申请公布日期 2014.03.10
申请号 KR20137030048 申请日期 2012.05.30
申请人 ZEON CORPORATION 发明人 OSAKU YUMI
分类号 G03F7/075;G03F7/004;G03F7/023;G03F7/032;H01L21/027 主分类号 G03F7/075
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