| 摘要 |
<p>The objective of the present invention is to provide a surfactant for obtaining a coating composition, a coating composition using the same, and a resist composition, wherein the coating composition has improved leveling properties, makes it difficult to generate bubbles, and is rapidly defoamed even though bubbles are generated. The surfactant of the present invention is obtained by copolymerizing a radical polymeric monomer (a1) having one alkyl group which has four carbon atoms and is directly combined with a fluorine atom, a radical polymeric monomer (a2) having an alkyl group which has six carbon atoms and is directly combined with a fluorine atom, and a radical polymeric monomer (a3) having polyoxyalkylene chains.</p> |
