| 摘要 |
An apparatus and a method for forming a fine pattern are provided to secure the stability of the fine pattern formed on a substrate by applying uniform pressurization force for pressurizing a stamp. Chambers(100,200) provide process spaces. A stamp chuck(110) is formed at a side of the process space. A stamp(20) on which a fine pattern is carved is attached to the stamp chuck. A stage(210) is formed on a position on which the stamp falls is formed at the other side of the process space. The stage supports a substrate(10) on which a photoresist layer(12) is formed. When the stamp is dropped from the stamp chuck and then contacted to the substrate, a pump pressurizes the stamp to implant pressurization gas into the chamber. The pressurization gas imprints the fine pattern to the photoresist layer. A substrate chuck(220) is formed on the stage to attach the substrate. The stamp chuck and the substrate chuck are electrostatic chucks for attaching the stamp to the substrate by using electrostatic force. |
