MULTI-CHANNEL LUMINOUS ENERGY SENSING UNIT, APPARATUS FOR MESURING LIGHT ENERGY OF EXPOSURE DEVICE AND METHOD FOR MESURING LIGHT ENERGY BY CHANNEL

摘要

The present invention relates to a multi-channel luminous energy sensing unit, an apparatus for measuring light energy of an exposure device, and a method for measuring light energy for each channel. The luminous energy sensing unit which senses the amount of light radiated from a light source according to an embodiment of the present invention comprises: a board; and multiple light sensor modules which are arranged on the board and sense at least two channel lights with different bands among lights radiating from the light source. Also, provided are the apparatus for measuring light energy of an exposure device including the same and the method for measuring light energy for each channel. [Reference numerals] (AA) I line; (BB) H line; (CC) G line