| 摘要 |
There is disclosed a heating element 10 comprising: at least
a heat-resistant base member 1;
a conductive layer 3 having a heater pattern 3a formed on the heat-resistant base member;
a protection layer 4 with an insulating property formed on the conductive layer; and
a corrosion-resistant layer 4p that is an oxide having an oxygen amount of stoichiometric ratio or less formed on the protection layer. There can be provided a heating element in which a corrosion-resistant layer whose resistivity or hardness is controlled is formed on a protection layer and through which the corrosive gas is difficult to be transmitted even under an environment of a high temperature and a corrosive gas and by which degradation due to corrosion of a conductive layer, particularly, a power-supply-terminal portion can be avoided and additionally which can fulfill a high function as an electrostatic chuck even when having a chuck pattern and which has a long operation life and is capable of being produced at a low cost. |
