CYCLIC AMINOSILANE COMPOUNDS HAVING EXCELLENT AFFINITY TOWARDS SILICON AND METAL ATOMS, PREPARING METHOD THEREOF, AND ITS APPLICATION

摘要

Disclosed are cyclic aminosilane compounds having oxygen atoms or sulfur atoms and nitrogen atoms together in one ring, which are represented by the chemical formulas (1) to (4), preparing method thereof and application thereof. In the chemical formulas, n and m represent integers of 0 to 5 inclusive independently; X represents an oxygen atom, a sulfur atom or an NR group independently; R1 and R2 represent a hydrogen atom, a C1-C10 alkyl group, a C1-C10 alkoxy group, a vinyl group or an allyl group independently; and R represents a hydrogen atom or a C1-C10 alkyl group. The cyclic aminosilane compounds according to the present invention can be used to obtain high-quality silicon films efficiently because the cyclic aminosilane compounds has strong affinity towards to silicon atoms and metal atoms.