| 摘要 |
The present invention relates to a device and a method for manufacturing a substrate of a semiconductor and, more specifically, to a unit for measuring a discharging quantity of a liquid crystal, which measures the discharging quantity of the liquid crystal of a head discharging a liquid drop such as polyimide (pl), a color filter (CF), and the liquid crystal, and a device for treating a substrate which discharges the liquid crystal to the substrate using the same. The device for treating a substrate according to an embodiment of the present invention includes a substrate support member supporting the substrate; a nozzle unit including a nozzle head in which a plurality of nozzles injecting a treatment solution to the substrate is located; and a measuring member measuring the discharging quantity of the treatment solution discharged from the nozzles. The unit for measuring a discharging quantity of a liquid crystal includes a collection container having a storage space accommodating the discharged treatment solution; a body having a plurality of channels and installed in the upper part of the collection container; and a discharging quantity measuring unit measuring the quantity of the treatment solution flowing through each channel and corresponding to each channel. Each channel is extended from the upper surface of the body to the bottom, and the channel is connected to the storage space. |
