MANUFACTURING METHOD OF MOLD FOR FORMING NANO-MICRO COMPOSITE PATTERN

摘要

The present invention relates to a method of manufacturing a mold for forming a nano-micro composite pattern, and provides a method of manufacturing a mold for forming a nano-micro composite pattern at a low process cost without an exposure process. The present invention provides a method of manufacturing a mold used to form a nano-pattern and a micro pattern, the method including: manufacturing a substrate for a mold having the micro pattern; manufacturing a nano-pattern substrate having a nano-pattern; forming a nano-pattern mold layer by coating a resin on the nano-pattern of the nano-pattern substrate and curing the resulting structure to laminate an adhesive layer on the nano-pattern mold layer; bonding the nano-pattern mold layer of the nano-pattern substrate onto the micro pattern of a substrate for the mold using the adhesive layer; and manufacturing a mold for forming a nano-composite pattern of a nan-pattern mold layer on a micro pattern region on the substrate for the mold by separating the nano-pattern substrate from the nano-pattern mold layer to remove the separated nano-pattern substrate. [Reference numerals] (AA) Manufacture substrate (for mold) of master pattern having micro pattern; (BB) Align nano-pattern substrate on micro pattern; (CC) Bond nano-pattern mold layer; (DD) Remove nano-pattern substrate-complete master mold; (EE) Coat polymer resin on master mold and transfer pattern; (FF) Remove master mold-complete polymer mold; (GG) Manufacture nano-pattern substrate having nano-pattern; (HH) Form nano-pattern mold layer; (II) Laminate nano-pattern mold layer