发明名称 |
OPENING AND CLOSING MODULE FOR EVAPORATOR AND DEPOSITION APPARATUS HAVING THE SAME |
摘要 |
An opening/closing module for an evaporator and an evaporation apparatus containing the same are disclosed. The module opens/closes a nozzle part of the evaporator and comprises a fixing unit disposed adjacent to the evaporator; a horseshoe-shaped rotating unit of which one side is hinged on the fixing unit around a hinge axis; a cover plate which is coupled to the other side of the rotating unit and opens/closes the nozzle part as the rotating unit tilts around the hinge axis; and a driving unit for tilting the rotating unit. |
申请公布号 |
KR101371708(B1) |
申请公布日期 |
2014.03.07 |
申请号 |
KR20120101661 |
申请日期 |
2012.09.13 |
申请人 |
SUNIC SYSTEM. LTD. |
发明人 |
LEE, HYOUN SUNG;CHOI, JAE SOO;KIM, SEONG HO;JEONG, HEE YEONG |
分类号 |
H01L51/56;C23C14/24 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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