发明名称 OPENING AND CLOSING MODULE FOR EVAPORATOR AND DEPOSITION APPARATUS HAVING THE SAME
摘要 An opening/closing module for an evaporator and an evaporation apparatus containing the same are disclosed. The module opens/closes a nozzle part of the evaporator and comprises a fixing unit disposed adjacent to the evaporator; a horseshoe-shaped rotating unit of which one side is hinged on the fixing unit around a hinge axis; a cover plate which is coupled to the other side of the rotating unit and opens/closes the nozzle part as the rotating unit tilts around the hinge axis; and a driving unit for tilting the rotating unit.
申请公布号 KR101371708(B1) 申请公布日期 2014.03.07
申请号 KR20120101661 申请日期 2012.09.13
申请人 SUNIC SYSTEM. LTD. 发明人 LEE, HYOUN SUNG;CHOI, JAE SOO;KIM, SEONG HO;JEONG, HEE YEONG
分类号 H01L51/56;C23C14/24 主分类号 H01L51/56
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