OBSERVATION WINDOW FOR HEAT TREATMENT CHAMBER OF SUBSTRATE, AND HEAT TREATMENT CHAMBER, APPARATUS AND METHOD OF SUBSTRATE HAVING THE SAME

摘要

The present invention discloses an observation window for a thermal treatment chamber of a substrate, and a thermal treatment chamber, a device and a method including the same. The observation window for the thermal treatment chamber of the substrate includes at least one of first to third transparent windows provided at the first, second and rear sides of the thermal treatment chamber of the substrate.