| 摘要 |
The present invention relates to an inertial sensor. The inertial sensor (100) includes a membrane (110), a mass (120) provided to a lower portion of the membrane (110), a post (130) provided to the lower portion of the membrane (110) to surround the mass (120), and a cap (140) provided to cover a low side of the post (130) and having a hole (145) communicating with an outside. Since the hole (145) is formed in the cap (140) so that an internal pressure of the inertial sensor (100) is maintained to be equal to an external pressure of the inertial sensor (100), even if temperature is varied, a stress applied to the membrane (110) according to the temperature variation can be reduced. |
