| 摘要 |
PROBLEM TO BE SOLVED: To provide an in-plane displacement measurement device that can trace an in-plane trajectory of an object in a predetermined field with nanometer accuracy.SOLUTION: An in-plane displacement measurement device 1 comprises: a light source part 10 that irradiates a moving object 2 with light; a light detection part 40 that has a light reception plane at a predetermined plane, and outputs time variant data by a frequency fat each time in accordance with a Doppler shift amount of light reaching a surface of the light reception plane of scattered light generated at the object 2 due to a light irradiation by the light source part 10; and a calculation part 50 that calculates a scattering angle &thetas;' of the scattered light generated at the object on the basis of the frequency fof data corresponding to light reaching detection positions P1 to P3 not on the same straight line on the light reception plane of the light reaching the light reception plane and a two-dimensional coordinate of the detection positions P1 to P3 of three points in a two-dimensional coordinate system in the predetermined in-plane, and calculates an in-plane displacement amount x on the basis of the calculated scattering angle &thetas;'. |
