发明名称 |
Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures |
摘要 |
A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away. |
申请公布号 |
US2014060792(A1) |
申请公布日期 |
2014.03.06 |
申请号 |
US201313975945 |
申请日期 |
2013.08.26 |
申请人 |
KLA-TENCOR CORPORATION |
发明人 |
WANG JINCHENG;CHIMMALGI ANANT;PATIL RAJEEV;KIM ERIK;BRUNNER RUDOLF;GIANG QUANG;WILSON LAUREN;GROSS KEN;BEZEL ILYA;SCOTT DAN;VORA YOUNUS;DERSTINE MATTHEW;LASFARGUES CEDRIC |
分类号 |
F28C3/04 |
主分类号 |
F28C3/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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