| 摘要 |
<p>The present invention relates to an actuator using a fluid of self-sensing impedance and an impedance self-sensing method. The actuator includes: a driving part comprising a moving unit and a magnetic field applying unit; an impedance sensing part sensing impedance variation of the driving part; and a control part controlling operation of the driving part by controlling the condition of power source applied to the driving part depending on the amplitude of the impedance sensed in the impedance sensing part. The actuator measures impedance generated depending on movement depth, and performs self-sensing of the impedance. [Reference numerals] (111) Driving unit;(112) Magnetic field applying unit;(120) Impedance sensing part;(130) Power supply and control part</p> |
