| 摘要 |
<p>This illumination monitoring apparatus is provided with: a plurality of optical fibers, which transmit illumination light emitted from a light source unit to an exposure head that is provided in an exposure apparatus, and among which at least one optical fiber has a non-shield region formed on the outer circumferential surface thereof, said region having leak light outputted therefrom; a light detector that receives the leak light; and a light guide unit, which is disposed around the non-shield region, and which guides the leak light to the light detector, said leak light having been inputted to the light guide unit.</p> |
