SUBSTRATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing device which can prevent erroneous detection of passage of a substrate by shortening convergence of an oscillating movement of an oscillating member and improve processing efficiency of the substrate by reducing an interval of substrate transfer and increasing transfer efficiency of the substrate.SOLUTION: A substrate detection device 2 of a substrate processing device 1 includes: a detection roller 6 on one end portion of an oscillating member 5; a weight 5C and a magnet 7 on the other end portion of the oscillating member 5; a detection sensor 8 which outputs a detection signal DS by detecting the change in a magnetic field generated by the magnet 7 when the oscillating member 5 is rotated in a rotation direction R from an initial position P1 of the oscillating member before a substrate B contacts the detection roller 6; and an oscillation stopper 11 which contacts the oscillating member 5 in order to maintain a state in which the oscillating member 5 is held obliquely with respect to a vertical line Z1 at the initial position P1 of the oscillating member 5. At the initial position P1 of the oscillating member 5, the oscillating member 5 is held obliquely with respect to the vertical line Z1.