| 摘要 |
The present invention relates to a manufacturing method for a cantilever element with a cantilever structure which includes a length unit which is extended from a second electrode formed on the top of a first insulator film to the upper part of a first electrode, and a contact point unit formed at the end of the length unit. The manufacturing method comprises: a first step which forms a first electrode at one side of the top of a first insulator film; a second step which forms a second insulator film and a second electrode consecutively on the first electrode and the first insulator film; a third step which etches between a contact point unit part on the second insulator film form on the first electrode and the first electrode; a fourth step which coats graphene on the top of the second electrode, the top of the length unit, and the contact point unit; and a fifth step which etches the second insulator film formed in the lower part of the length unit. The cantilever element using graphene and a manufacturing method thereof can reduce a separation distance of a contact point part by replacing a metal electrode playing a role of an MEMS probe with a graphene material with excellent electrical conductivity and mechanical elasticity, can effectively reduce operating voltage applied to the relevant separation distance, can facilitate both the application of structures with various shapes and the forming process compared with a probe structure using a simple graphene material, can increase sensitivity for the applied voltage and be applied to various MEMS elements such as FPGA and Gyroscope, and can provide an effect of improving electrical characteristics using graphene with excellent electrical conductivity and low Young′s Modulus characteristics as a thinner film than general metal. |
