| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface light-emitting laser element that has highly uniform electric resistance in a low oscillation threshold current, and has excellent wavelength controllability.SOLUTION: The surface light-emitting laser element includes a lower part reflection mirror 102 formed on a substrate 101, an active layer 104 formed on the lower reflection mirror, and an upper reflection mirror 106 formed on the active layer. A plurality of surface light-emitting lasers 11 and 12 are provided from a side where the upper reflection mirror is formed for emitting laser beams; and a second phase adjustment layer 108, a contact layer 109, a first phase adjustment layer 111, and a wavelength adjustment layer 112 are formed on the upper reflection mirror in this order from the active layer side. When λ is a laser beam wavelength, and N is a positive integer, the total sum of an optical thickness of the second phase adjustment layer, the contact layer, the first phase adjustment layer, and the wavelength adjustment layer becomes substantially (2N+1)×λ/4, and the optical thickness from the end of the second phase adjustment layer to the center part of the contact layer is substantially λ/2. One of the surface light-emitting lasers has the wavelength adjustment layer having a thickness different from that of the other of the surface light-emitting lasers, and emits laser beams having a wavelength different from that of the other of the surface light-emitting lasers. |
