| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of further accurate quantitative analysis, and a computer program.SOLUTION: The X-ray analyzer calculates first intensities of peaks of each element by peak resolution of a spectrum of characteristic X-rays based on the assumption of an intensity ratio of a plurality of peaks due to the element, and variation of peak intensities is limited and then peak resolution in a limited energy range is performed, and concentrations of a plurality of elements are calculated on the basis of obtained second intensities of peaks. The X-ray analyzer calculates an intensity ratio of a plurality of peaks due to each element on the basis of calculated concentrations of the plurality of elements and calculates third intensities of peaks of each element by peak resolution using the calculated intensity ratio. Processing is repeated until variation of peak intensities is sufficiently reduced, whereby concentrations of a plurality of elements included in a sample S are calculated more accurately than prior arts. |
