发明名称 |
METHODS AND SYSTEMS FOR MEMS CMOS-BASED RADIO FREQUENCY FILTERS HAVING ARRAYS OF ELEMENTS |
摘要 |
Systems and methods for manufacturing a chip comprising a MEMS-based radio frequency filter arranged in an integrated circuit are provided. In one aspect, the systems and methods provide for a chip including electronic elements formed on a semiconductor material substrate. The chip further includes a stack of interconnection layers including layers of conductor material separated by layers of dielectric material. A radio frequency filter is formed within the stack of interconnection layers by applying gaseous HF to the interconnection layers. The radio frequency filter includes a plurality of mechanically decoupled resonator elements. |
申请公布号 |
US2014062619(A1) |
申请公布日期 |
2014.03.06 |
申请号 |
US201213674440 |
申请日期 |
2012.11.12 |
申请人 |
BAOLAB MICROSYSTEMS SL;BAOLAB MICROSYSTEMS SL |
发明人 |
MONTANYA SILVESTRE JOSEP;LLAMAS MOROTE MARCO ANTONIO |
分类号 |
H01P11/00;H01P1/20 |
主分类号 |
H01P11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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