| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique which is advantageous for checking a connected state of a transmission line in a drawing device.SOLUTION: A drawing device for performing drawing on a substrate with a plurality of charged particle beams includes: a blanker array including a plurality of groups including one light-emitting element and at least one blanker; and a plurality of transmission lines which transmit control signals to each of the plurality of groups. Each light-emitting element emits light when signals are supplied via the transmission line connected to the group including the light-emitting element out of the plurality of transmission lines. |
