| 摘要 |
PROBLEM TO BE SOLVED: To provide a shield member which prevents sputter particles from adhering to a substrate mounting surface of a substrate holder installed inside a vacuum vessel to suppress substrate contamination and contamination in other manufacturing devices, and suppresses generation of particles.SOLUTION: A shield member includes: a first member 19 which is arranged in the vicinity of a substrate holder 7 and brings a closed state of shielding between the substrate holder 7 and a target holder 6 or brings an opened state of opening between them by first drive means 32; and a second member 21 which is installed on the surface of the substrate holder 7 and on the outer peripheral part of a substrate. The first member 19 is formed with at least one ring-shaped concentric circular first projection 19a extending in a direction of the second member 21, and the second member 21 is formed with at least one ring-shaped concentric circular second projection extending in a direction of the first member 19 and engaged with the first projection 19a in a non-contact state at a position where the substrate holder 7 approaches the first member 19. |
