发明名称 3D TSV ASSEMBLY METHOD FOR MASS REFLOW
摘要 <p>Disclosed herein is a method that includes picking up a plate with a nozzle, the plate including at least one opening to allow air to flow therethrough. The method includes picking up a die with the nozzle such that the plate is located between the nozzle and the die. The method includes placing the die and the plate onto a device, substrate or another die such that the plate is located on top of the die. The method includes heating the device, substrate or another die and the die in a heat chamber while the plate remains on top of the die to permanently attach the die to the device, substrate or another die. Further disclosed herein is an assembly system configured to perform a method that utilizes the plate and die combination for attaching the die to a device, substrate or another die by heating.</p>
申请公布号 WO2014036257(A1) 申请公布日期 2014.03.06
申请号 WO2013US57289 申请日期 2013.08.29
申请人 UNIVERSAL INSTRUMENTS CORPORATION;GIESKES, KOENRAAD ALEXANDER 发明人 GIESKES, KOENRAAD ALEXANDER
分类号 H01L29/06;H01L21/00 主分类号 H01L29/06
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