发明名称 |
COMPOSITE CHARGED PARTICLE BEAM APPARATUS AND THIN SAMPLE PROCESSING METHOD |
摘要 |
A composite charged particle beam apparatus includes: a FIB column irradiating a thin sample with FIB; a GIB column irradiating the thin sample with GIB; a sample stage on which the thin sample is placed; a first tilt unit for tilting the thin sample about a first tilt axis of the sample stage, the first tilt axis being orthogonal to an FIB irradiation axis and being located inside a first plane formed by the FIB irradiation axis and a GIB irradiation axis; and a second tilt unit for tilting the thin sample about an axis which is orthogonal to the FIB irradiation axis and the first tilt axis. |
申请公布号 |
US2014061159(A1) |
申请公布日期 |
2014.03.06 |
申请号 |
US201314012019 |
申请日期 |
2013.08.28 |
申请人 |
HITACHI HIGH-TECH SCIENCE CORPORATION |
发明人 |
ASAHATA TATSUYA;SUZUKI HIDEKAZU;TORIKAWA SHOTA |
分类号 |
H01J37/30;H01J37/02 |
主分类号 |
H01J37/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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