| 摘要 |
A manufacturing method of the solar battery and the solar battery which is manufactured thereby are provided to improve the current characteristic by increasing the internal reflection at the long wave region. A manufacturing method of the solar battery includes the following steps: the step for forming the silicon nitride etch stopping layer(203) on the one side of the silicon wafer(201); the step for forming the concavo-convex on the reverse surface on which the etch stopping layer is formed by texturing the silicon wafer on which the etch stopping layer is formed; the step for forming the emitter layer of the opposite conductive type to conductive type of the silicon wafer on the side on which the concavo-convex of the silicon wafer is formed; the step for forming the reflection barrier layer on the emitter layer; the step for forming the front electrode which is connected to the emitter layer while passing through the reflection barrier layer; the step for forming the back contact electrode which is connected to the silicon wafer while passing through the etch stopping layer. |
