| 摘要 |
<p>A micro electro-mechanical system switch capable of improving endurance includes: a substrate; a fixing electrode and a signal line which are separated from each other on the substrate; an operation beam which is partially overlapped with the fixing electrode and the signal line with a preset air gap on the substrate, and is electrically connected to the signal line according to the operation of the fixing electrode. And, the operation beam is formed in a conductive metal layer. The thickness of the metal layer of a first region where the fixing electrode is formed is thicker than that of the metal layer of a second region where the signal line is formed.</p> |
