| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate manufacturing method in which manufacturing efficiency is improved by simultaneously forming a plurality of tapered recess portions.SOLUTION: A substrate 11 is manufactured through a recess forming process. In the recess forming process, a plurality of recess portions are simultaneously formed that are open on a main surface of the substrate by applying abrasive grain processing for spraying abrasive grains T1 from a nozzle 31 toward the main surface of the substrate which is supported by a support body 12. Further, in the recess forming process, the plurality of recess portions are formed such that an inner diameter gradually becomes larger toward a main surface side of the substrate to form a tapered shape, by rotating the support body 12 around a support shaft 13 or by moving the support body 12 so that an inclination direction of the main surface of the substrate is changed, in a state of tilting the main surface of the substrate relative to a discharging direction of the abrasive grains T1 . |
