发明名称 PRODUCTION EFFICIENCY IMPROVING APPARATUS, PRODUCTION EFFICIENCY IMPROVING METHOD, AND COMPUTER PROGRAM
摘要 <p>A production efficiency improving apparatus includes a first communicating means for communicating information with a plurality of processing apparatuses that process objects, and a second communicating means for communicating conveyance control information, with a conveyance system comprising conveyance apparatuses for conveying the objects between the plurality of processing apparatuses. A means for predicting, on the basis of information communicated by the first communicating means, the conveying timing at which the processing apparatus needs to send out processed objects, and the conveying timing at which the processing apparatus needs to bring in unprocessed objects. A generating means generates the control information such that the conveyance apparatus will arrive at the processing apparatus that is the destination of the communication of information at the predicted timing predicted by the means for predicting.</p>
申请公布号 KR20140027105(A) 申请公布日期 2014.03.06
申请号 KR20137023564 申请日期 2012.03.09
申请人 TOKYO ELECTRON LIMITED;MURATA MACHINERY. LTD.;MA SOLUTIONS LIMITED;DAIFUKU CO., LTD. 发明人 ASAKAWA TERUO;YAMAMOTO MAKOTO;MACHIDA AKIRA;KAWAGUCHI MASAAKI
分类号 H01L21/677 主分类号 H01L21/677
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