发明名称 Image Intensifier Tube Design for Aberration Correction and Ion Damage Reduction
摘要 The disclosure is directed to image intensifier tube designs for field curvature aberration correction and ion damage reduction. In some embodiments, electrodes defining an acceleration path from a photocathode to a scintillating screen are configured to provide higher acceleration for off-axis electrons along at least a portion of the acceleration path. Off-axis electrons and on-axis electrons are accordingly focused on the scintillating screen with substantial uniformity to prevent or reduce field curvature aberration. In some embodiments, the electrodes are configured to generate a repulsive electric field near the scintillating screen to prevent secondary electrons emitted or deflected by the scintillating screen from flowing towards the photocathode and forming damaging ions.
申请公布号 US2014063502(A1) 申请公布日期 2014.03.06
申请号 US201313957890 申请日期 2013.08.02
申请人 KLA-TENCOR CORPORATION 发明人 JIANG XIMAN;LI QING;BIELLAK STEPHEN
分类号 H01J40/16 主分类号 H01J40/16
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