发明名称 APPARATUS FOR AND METHOD OF ALIGNING AND TRANSPORTING WORKPIECES
摘要 A workpiece alignment apparatus and method, the apparatus comprising: a workpiece alignment unit onto which a workpiece is in use passed, wherein the workpiece alignment unit comprises a fluid distribution member which has an apertured upper, support surface, which provides a supporting fluid cushion on which a workpiece, when passed thereonto, is supported and aligned, wherein the support surface presents at least two regions from which fluids of different pressure and/or flow rate are delivered, thereby generating a differential pressure across regions of the support surface, said differencial pressure acts to cause the workpiece to be moved and aligned thereon.
申请公布号 WO2013178786(A3) 申请公布日期 2014.03.06
申请号 WO2013EP61261 申请日期 2013.05.31
申请人 DTG INTERNATIONAL GMBH 发明人 WILLSHERE, RICHARD;OGG, ANDREW
分类号 H01L21/677;H01L21/68 主分类号 H01L21/677
代理机构 代理人
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