| 摘要 |
PROBLEM TO BE SOLVED: To provide a light irradiation apparatus and method, capable of preventing degradation of light emission sources in an early stage by allowing a light volume of a plurality of the light emission sources to be different from each other.SOLUTION: A light irradiation apparatus 10 makes an ultraviolet ray irradiate an adhesive sheet S of ultraviolet ray setting type which is pasted on a semiconductor wafer W. The light irradiation apparatus 10 includes a light emitting means 12 which is arranged relatively to a table 11 and contains a plurality of light emitting diodes 20, a driving means 15 to rotate the table 11 and the light emitting means 12 relatively to each other, and an inverting means 16 which replaces one end A side with the other end B side of the light emitting means 12 each other to a rotational center C side of relative rotation. The light emitting diodes 20 positioned on the rotational center C side are set lower in light volume than the light emitting diodes 20 positioned outside to prevent early degradation, and the one end A side and the other end B side are replaced with each other by the inverting means 16 each time a predetermined time period passes. |
