发明名称 ELECTRONIC APPARATUS AND METHOD OF MANUFACTURING THE SAME, AND OSCILLATOR
摘要 PROBLEM TO BE SOLVED: To provide an electronic apparatus in which reduction in the degree of vacuum in a cavity part can be easily suppressed, and to provide a method of manufacturing the electronic apparatus.SOLUTION: An electronic apparatus 100 includes: a substrate 10; a cavity part 40 which is formed on the substrate 10 and inside which a functional element 20 is arranged; a first protrusion 32 formed on a surface 17 defining the cavity part 40 of the substrate 10; a covering layer 70 covering the cavity part 40 from above; and interlayer insulation layers 50, 52 which are formed on the substrate 10 and formed around the cavity part 40. The first protrusion 32 is constituted including magnesium.
申请公布号 JP2014041076(A) 申请公布日期 2014.03.06
申请号 JP20120183897 申请日期 2012.08.23
申请人 SEIKO EPSON CORP 发明人 KAYANO YUJI
分类号 G01C19/5656;B81B7/02;B81C1/00;G01C19/5663;H03B5/30;H03H3/007;H03H9/24 主分类号 G01C19/5656
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