发明名称 VERSATILE, FLEXIBLE, AND ROBUST MEMS/NEMS SENSOR FOR DECOUPLED MEASURING OF THREE-DIMENSIONAL FORCES IN AIR OR LIQUIDS
摘要 A force measuring device. The device comprises an x-axis sensor beam for measuring x-direction forces, a y-axis sensor beam for measuring y-direction forces, a z-axis sensor beam for measuring z-direction forces, and wherein the x-axis, y-axis and z-axis sensor beams are decoupled such that forces exerted by a specimen in one direction do not exert substantial forces on the other two sensor beams.
申请公布号 US2014060207(A1) 申请公布日期 2014.03.06
申请号 US201213598661 申请日期 2012.08.30
申请人 YANG SHENGYUAN 发明人 YANG SHENGYUAN
分类号 G01L1/00 主分类号 G01L1/00
代理机构 代理人
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