发明名称 Secondary Plasma Detection Systems and Methods
摘要 A system includes a control module, a detection module, and a reaction module. The control module is configured to receive a sensor signal indicating a power characteristic of an output power provided from a power generator to a load. The load is separate from the control module and the power generator. The detection module is configured to (i) detect a shift parameter of the power characteristic based on the sensor signal, (ii) compare the shift parameter to a first threshold, and (iii) indicate whether the shift parameter has exceeded the first threshold and not a second threshold. The reaction module is configured to indicate that a low-level abnormality exists in the load in response to the shift parameter exceeding the first threshold and not the second threshold.
申请公布号 US2014062305(A1) 申请公布日期 2014.03.06
申请号 US201313826571 申请日期 2013.03.14
申请人 MKS INSTRUMENTS, INC. 发明人 KLEIN JESSE N.;PHAM RICHARD
分类号 G01R31/00;H01J37/32 主分类号 G01R31/00
代理机构 代理人
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