MANUFACTURING METHOD FOR VIBRATOR, VIBRATOR, OSCILLATOR, AND ELECTRONIC APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method for a vibrator that can reliably prevent waste from occurring in weight portions when the weight portions are formed on a vibration plate and the vibrator is manufactured.SOLUTION: A manufacturing method for a vibrator that has a vibration plate 11 and weight portions 12a and 12b and has a frequency adjusted to a target frequency repeatedly performs; a weight portion formation step of forming the weight portions 12a and 12b by a vapor deposition device 1 on the vibration plate 11 having a frequency band higher than the target frequency; and a frequency measurement step of measuring the frequency in a state that the weight portions 12a and 12b are formed. The vapor deposition device 1 comprises: a first chamber 15; a second chamber 16; a coupling tube 2; heating means 4; and pressure adjustment means 5. Base materials 12' are vaporized by the heating means 4 being activated while the pressure adjustment means 5 is being activated, the vaporized base materials 12' become particles 12'' in a process where passing through the coupling tube 2, and the particles 12'' are sprayed against the vibration plate 11. Thus, the weight portions 12a and 12b are formed on the vibration plate 11.