| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacitance type displacement sensor capable of having a large measurement range and measuring displacements between two surfaces of an object to be measured facing each other in a plurality of directions.SOLUTION: A displacement sensor comprises: a first sensor unit 2 having a first substrate 21, an X1 sensor electrode 22 where a pattern is formed in an X-axis direction on the first substrate 21, a Y1 sensor electrode 23 where a pattern is formed in a Y-axis direction, and a Z1 sensor electrode 24 arranged in a position that does not overlap with each of the X1, Y1 sensor electrodes 22, 23; and a second sensor unit 3 having a second substrate 31, an X2 sensor electrode 32 where a pattern is formed on the second substrate 31 in an X-axis direction that is the same direction as an arrangement direction of the X1 sensor electrode 22, a Y2 sensor electrode 33 where a pattern is formed in a Y-axis direction that is the same direction as an arrangement direction of the Y1 sensor electrode 23, and a Z2 sensor electrode 34 arranged in a position that does not overlap with each of the X2, Y2 sensor electrodes 32, 33 and that faces the Z1 sensor electrode 24. |
