METHOD FOR SEALING GAS

摘要

PROBLEM TO BE SOLVED: To provide a method for sealing a gas, which maintains airtightness to a high degree at the fitting part between the insertion part and the support part of a segmented reaction vessel for use in manufacturing device of a polycrystalline silicon.SOLUTION: The method for sealing a gas at the fitting part between the insertion part and the support part of a segmented reaction vessel for use in manufacturing device of a polycrystalline silicon includes at least the step of arranging a string-like gas sealing material in a groove formed at the fitting part. The gas sealing material is formed by treating a metal wire reinforced braid of ceramic fiber with inorganic filler and/or organic filler.